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Series 5000 Summary
Series 5000 Microsense II Probes are capacitive transducers used in
conjunction with the 5000 Series eletronic consoles to make very
precise, very fast dimensional measurements.
The Series 5000 Microsense II Probe family has been designed to
accommodate an extensive range of target dimensions and motion
envelopes as well as a variety of fixturing and target-access limita-
tions.
This product description is to be used in conjunction with descrip-
tions for the Series 5130 OEM module or the Model 5300 gaging
console. Guidelines for selecting the probe(s) suitable for your
application are included in this product description.
www.adetech.com
Capacitive sensing element
Compact
Detachable cable
Stainless steel housing
Wide variety of sizes available
Microsense II Active Probes
Probe Description
Series 5000 Microsense II Probes are offered in a variety of sizes and shapes.
Every probe in this product description is supplied with a 3-meter cable that plugs
into the front panel of the mating module or gage board. Extension cables are
available up to 30 meters long (consult your sales representative or distributor).
Series 5000
Features
Non-contact
No probe wear
Easily fixtured
High resolution
High frequency response
Benefits
Computer hard disk motors
Thickness applications
Spindle runout
Metallic parts gaging
Research & development
Vibration analysis
Servo control
High-volume measurement
Applications
PROBE
CABLE
5130 MODULE
SENSOR
INSULATOR RING
STANDOFF
(SHOWN EXAGGERATED)
TARGET
Usage Diagram for Non-Contact Series 5000 Probes
Microsense II System : Series 5000 Probes with Gaging Console Models - Axial Probes
Model - 5504
0.5 mm diameter sensor
RMS distance noise in nanometers [microinches]*
1 kHz
0.5 [0.02]
5 kHz
0.5 [0.02]
20 kHz
0.7 [0.03]
100 kHz
1.9 [0.07]
Bandwidth:
1 kHz
1.1 [0.05]
5 kHz
1.5 [0.06]
20 kHz
2.2 [0.09]
100 kHz
6.7 [0.27]
Bandwidth:
Total distance range: 50
µ
µm [2.0 mils]
Total distance range: 100
µ
µm [4.0 mils]
RMS distance noise in nanometers [microinches]*
Total distance range: 100
µ
µm [4.0 mils]
Total distance range: 250
µ
µm [10.0 mils]
1 kHz
10.2 [0.40]
5 kHz
10.3 [0.41]
20 kHz
10.8 [0.43]
100 kHz
17.9 [0.70]
Bandwidth:
1 kHz
1.1 [0.05]
5 kHz
1.1 [0.05]
20 kHz
1.3 [0.06]
100 kHz
2.7 [0.12]
Bandwidth:
Model - 5501
1 mm diameter sensor
RMS distance noise in nanometers [microinches]*
Total distance range: 250
µ
µm [10.0 mils]
Total distance range: 500
µ
µm [20.0 mils]
1 kHz
4.6 [0.18]
5 kHz
5.7 [0.23]
20 kHz
7.6 [0.30]
100 kHz
22.3 [0.88]
Bandwidth:
1 kHz
1.7 [0.07]
5 kHz
2.1 [0.09]
20 kHz
2.7 [0.12]
100 kHz
5.8 [0.23]
Bandwidth:
Model - 5502
2 mm diameter sensor
RMS distance noise in nanometers [microinches]*
Total distance range: 500
µ
µm [20.0 mils]
Total distance range: 1.0 mm [40.0 mils]
1 kHz
5.7 [0.23]
5 kHz
6.5 [0.26]
20 kHz
9.0 [0.36]
100 kHz
20.1 [0.79]
Bandwidth:
1 kHz
2.9 [0.12]
5 kHz
2.9 [0.12]
20 kHz
3.4 [0.14]
100 kHz
5.3 [0.21]
Bandwidth:
Model - 5503
5 mm diameter sensor
= Recommended clamping area
Shaded area
* at maximum probe-to-target spacing www.adetech.com
Models - Blade Probes
25.4
[1.000]
57.15
[2.250]
[ø0.125] thru typ
0.001 [0.0254]
[0.040 ]x 45° chamfer
19.304
[.760]
57.15
[2.250]
0.127
[0.005]
0.254
[0.010]
0.635 x 3.175
[0.025 x 0.125] sensor
1.016
ø3.175
NOTES:
DIMENSIONS SHOWN AS FOLLOWS;
MILLIMETERS [INCHES]
0.4572
[0.018]
0.635 x 3.175
[0.025 x 0.125]
sensor
0.4826
[ø0.019]
sensor
0.7366
[0.029]
ø1.6764
ø[0.066]
sensor
1.2192
[0.048]
Detail: Side-looking sensors
10.16
[.400 ]
16.51
[.650]
2.54
[0.100] typ
21.59
[.8500]
12.7
[.500]
2.54
[0.100]
0.508 x 2.54
[0.020 x 0.100] sensor
0.127
[0.005]
0.254
[0.010]
Sensor Dimension: .025 x .125 RMS distance noise in nanometers [microinches]*
Total distance range: 100
µ
µm [4.0 mils]
Total distance range: 250
µ
µm [10.0 mils]
1 kHz
1.5 [0.06]
5 kHz
2.0 [0.08]
20 kHz
3.6 [0.14]
100 kHz
10.7 [0.42]
Bandwidth:
1 kHz
0.7 [0.03]
5 kHz
0.7 [0.03]
20 kHz
0.8 [0.03]
100 kHz
1.6 [0.07]
Bandwidth:
Model
5602
Model
5604
Model
5603
Model
5601
Model
5605 www.adetech.com
Probe Selection Procedure
East Coast Headquarters:
77 Rowe Street
Newton, Massachusetts 02466
Phone: (617) 831-8000
Fax: (617) 831-8195 2000 ADE Corporation (specifications subject to change without notice)
080100
West Coast:
1525 McCandless Drive
Milpitas, California 95035
Telephone: (408) 957-0120
FAX: (408) 957-0121
ADE Technologies, Inc.
Determine Probe Ordering
Information
Use answers 2,3, and 4 above for
probe and sensor size. Consult
sensor drawings.
Refer to your Series 5300, or Series 5130 product description for selection of appropri-
ate electronics.
Note: On special request, probes can be custom designed to suit specific customer needs.
Consult the factory.
Select Probe Style
Axial style is usually preferred,
however other styles are avail-
able to facilitate target access.
Refer to the probe diagrams on
the preceding pages.
Axial
Lo-Profile
Right Angle
30
o
Axial
Correct Standoff
Incorrect
Standoff
Determine Optimum Sensor Size -
from step 2 answers
For best overall performance
select the larger sensor size
option. However, smaller sensor
sizes may be preferred if surface
profile or flatness of a textured
surface is being measured, or if
measurements are being made
near a target edge.
SENSORS
SENSOR OUTPUTS
A
B
C
Target Surface
Sensor A
Sensor C
Sensor B
Calculate Maximum Sensor
Diameter
(Note: This dimension is less
than the minimum target dimen-
sion because all of the spread-
ing electric field needs to be on
the target surface.)
1
Minimum Target Dimension X Shape Constant
= Maximum Sensor Diameter
___________
X
{
0.60 for Flat Target
0.25 for Cylindrical Target
0.20 for Spherical Target
}
=
___________
Sensor
Dia.
Minimum
Target
Dimension
Sensor
Minimum
Target
Dimension
Dia.
Sensor
FLAT
CYLINDRICAL
SPHERICAL
Minimum
Target
Dimension
Identify Target Shape and
Minimum Target Dimension
by observing item to be meas-
ured and comparing with the
guidance illustrations.
2
3
4
5
Steps
Guidance