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Table of Contents Radiation Testing N
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Table of Contents Radiation Testing
Page
Test Philosophy
31
Nationals Radiation Effects Laboratories
31
All About Nationals South Portland, Maine, REL
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Certification Maine
31
Test Methodology Maine
31
The Step-by-Step Process Maine
32
Complete Testing and Characterization
32
All About Nationals Santa Clara, California, REL
33
Certification California
33
Test Methodology California
33
The Step-by-Step Process California
33 Test Philosophy
Nationals Mil/Aero group offers a solution to reduce
extensive shielding measures while maintaining cost
effectiveness. By testing inherently radiation-resistant
standard devices, National provides products that offer:
t QML-V or Q testing, or custom testing as outlined in
customer SCDs (Source Control Drawings)
t Guaranteed specifications for reliable radiation
designs
t Cost effectiveness
t Timely delivery
Through this Mil/Aero Radiation Program, prod-
ucts are fully qualified with respect to different radiation
environments. Complete total dose radiation data is sup-
plied with each customer order.
National recognizes that radiation resistance
needs differ within tactical and space environments. Our
radiation testing program is flexible to individually
address your radiation and processing needs. Process
flows include QML-V and Q, Standard Military Drawings
(SMDs), MIL-STD-883, and SCDs to Levels S and B.
Nationals Radiation Effects Laboratories
National Semiconductor operates radiation effects labora-
tories (REL) in South Portland, Maine; and Santa Clara,
California.
All About Nationals South Portland, Maine, REL
Certification Maine
t Dose rate of the Gammacell is certified by the use of
National Institute of Standards and Technology (NIST)
ionizing dose dosimetry.
t Licensed by the Nuclear Regulatory Commission
(NRC) to handle neutron-irradiated material. This
capability permits testing product for both total dose
and neutron irradiation. National currently contracts
Sandia National Labs and White Sands Missile Range
to perform Neutron irradiation tests.
t Certified by the Defense Supply Center, Columbus,
Ohio (DSCC) for Total Dose Lab Suitability. This signi-
fies that the REL meets all government requirements
to perform total dose
testing.
t Lab Suitability certifi-
cation denotes that
testing performed
at Nationals
South Portland
REL facility
and the data
generated
are fully
recognized
and accept-
able by all
government
agencies,
their con-
tractors,
and sub-
contractors.
This quali-
fies the
South
Portland
REL to support QML-V RHA programs for FACT prod-
uct, for production radiation qualification of all of
Nationals product lines, and for any customer-
requested testing that requires total dose data from a
DSCC-certified laboratory.
t REL research includes evaluation of Nationals analog,
interface, logic, and memory families as well as other
products requested by customers.
Test Methodology Maine
Under Nationals test methodology, sample devices are
tested to establish the peak radiation operating levels of
each function. While pass/fail or attribute testing is
important, Nationals Mil/Aero South Portland REL endors-
es parametric or variable testing. These test results are
based on step-stress irradiation responses.
Nationals wafer radiation testing provides con-
sistent device radiation tolerance performance. Wafer
testing eliminates significant variability from lot-to-lot or
31
N
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Radiation Testing
Nationals Gammacell in South Portland, Maine
Radiation Testing wafer-to-wafer. All devices have complete lot and wafer
traceability, and each device is guaranteed to be compli-
ant with your SCD. In fact, typical test results exceed the
minimum requirements specified in customers SCDs.
Comprehensive data reduction and statistical
analysis is performed and provided with each order,
including electrical performance based on device test
results and radiation testing with compliance with Level V
and Level Q process flows. National also offers cus-
tomers an opportunity to review test results prior to
accepting products from any particular wafer.
Offering the best partnership relationship possi-
ble, we work with you to ensure that all testing complete-
ly suits your needs.
The Step-by-Step Process Maine
1.
All wafers are fabricated according to S-Level or
equivalent specifications. This includes SEM
(Scanning Electron Microscope) inspection of two
metalization steps and wafer lot acceptance data.
2.
Each wafer selected for radiation testing is classified
as a wafer lot and is stored in a wafer bank for
radiation-hardened product.
3.
Total Dose testing is performed at room temperature
(+25C) in full accordance with MIL-STD-883E,
Method 1019.5.
4.
The twelve (minimum per wafer) radiation test die
subjected to testing are chosen just beyond the RHA
area. This area is defined as that part of the wafer
enclosed by 2/3 of the wafers radial dimension as
drawn from the center toward the wafer edge. Die
within this area are used if the customer invokes this
QML requirement.
5.
Sample die are assembled and tested to full QML or
customer specifications prior to radiation testing.
6.
Every product type is qualified under worst-case
bias conditions for Total Dose radiation response
on a step-stress irradiation basis, e.g., at radiation
interval levels of 3 krad(Si), 10 krad(Si), etc., up to
100 krad(Si) or to functional failure.
7.
Radiation characterization includes determining the
Total Dose level where parametric and functionality
failures occur. The lowest Total Dose failure level is
dictated by whichever failure occurs first paramet-
ric or functionality. The highest passing level is dic-
tated by no parametric or functional failures.
8.
Extended room anneal is performed in accordance
with MIL-STD-883E, Method 1019.5, paragraph 3.11.
9.
Each completed wafer that is accepted for radiation-
qualified products is die-banked for future use.
10. A customer may purchase a whole or partial wafer
lot. If the entire lot is purchased, the radiation-quali-
fied wafer is die banked pending the customers
release of the remaining die or until all usable die
from that lot are delivered. If only a small quantity
of die is purchased from a radiation-qualified wafer
lot, the die balance remains available to other
customers.
11. Various types of data are provided to the customer,
i.e., raw data, statistical data, delta data, or box plots
(distribution) of the radiation data, as requested on
the customer purchase order.
12. There are several approaches to purchasing radia-
tion-guaranteed product. Radiation-hardened space
product generally incur the highest cost due to the
extra non-radiation test issues and requirements of
V-Level processing.
13. Wafer and lot traceability are automatic on all RHA
products.
14. Radiation data on Nationals Logic products is guar-
anteed if National in South Portland, Maine, per-
forms the radiation tests.
Complete Testing and Characterization
Total dose testing is performed by National
Semiconductor in its South Portland, Maine, facility using
an NRC-licensed and NIST-certified Gammacell 220. Both
in-flux and remote radiation testing can be performed on
each device type. After each total dose radiation level,
MCT or LTX automatic testers are used to perform com-
plete parametric and functional testing. All irradiation
testing is performed in accordance with MIL-STD-883E,
Method 1019.5. As requested by our customers, other
testing can also be completed. FACT wafer fabrication is
DSCC-certified to QML-V.
Nationals Mil/Aero Logic testing goes beyond
radiation qualification. Research and development radia-
tion testing is regularly performed, providing insight to
threshold voltage shifts, field oxide hardness, time depen-
dent effects, and more. Radiation testing is performed on
transistors, diodes, and capacitors of wafer fab process
monitors. As progress is made toward more in-depth
understanding of various radiation effects, changes in pro-
N
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Radiation Testing (cont.)
32 cessing, layout, and circuit design will occur to increase
the particular technologys radiation resistance.
Transient radiation testing has been performed
on FACT product by Boeing Radiation Effects Lab (BREL)
in Seattle, Washington. These tests verify the inherent
latchup-free capability of FACT-Epi product. FACT prod-
ucts have been manufactured on a thin Epi-CMOS process
with low-resistivity materi