gh Power RKW Series Power
Supplies

Model Number: RKW 24-14K, RKW 28-23K,
RKW 48-32K

Serial Number (Unit Tested): 36400762,
32400593, and 29400545

See Attachment C for SEMI F47 Description
and Detailed Test Results.




Test Configuration: The Power Supplies
were tested using SEMI F42 compliant voltage
sag generator equipment.

Test Date(s):
July 17,18, 2003

Test Location:
EPRI PEAC Corporation
942 Corridor Park Blvd
Knoxville, TN 37932

Electrical Environment:
208Vac Single Phase, 50/60 Hz
(See Attachment A for details.)

This letter and subsequent documentation certifies that the KEPCO power Supplies mentioned above and in this
document, in their original configuration has been voltage sag tested per SEMI F42 test protocol and was found to
comply with the SEMI F47 voltage sag immunity standard at 50Hz and 60Hz. Based on these test results, it is
expected that the entire RKW high power unit line is SEMI F47 compliant. This certification remains valid to the
models tested only and as long as no component substitutions are made.



Certified by,


Eric L. Hubbard
PQ Star Certification Test Technician











High-Power RKW Series Power Supplies




2


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Testing was performed EPRI PEACs Power Quality Laboratory in Knoxville, TN. The test protocol followed was
SEMI F42 Test Method for Semiconductor Processing Equipment Voltage Sag Immunity. During the voltage sag
test; the Power supplies were connected to a load bank and loaded to 100% of their load. Table A-1 shows the
nominal power supplies model number, their power ratings, and the load conditions they were tested at.

Table A-2 through Table A-4 lists all points tested per SEMI F42 test method, per individual power supply. Figures
A-1 through Figure A-3 show the power supply specific SEMI F47 ride-through curve. The SEMI specific points
are highlighted for both 50 and 60 Hz. The power supplies were tested at points below the curve to fully
characterize the components. During the testing of SEMI F47 test points (1s at 80%, 0.5s at 70%, 0.2s at 50%, and
0.05s at 50%) the output voltage of the power supply did not deviate. Deviation is noted in the test tables and at
what points the output voltage deviated. Its important to note that all of the power supplies passed at 50 and 60 Hz,
according to the SEMI F47 standard.
2#76')!89):;<'=)+5>>6?'3)#(@)A;#@3))
Kepco Power Supplies Testing

Rated Load
Tested Load
Model #
Power (W) Vdc (V) Idc (a) R (ohms) Power (W) Vdc (V) Idc (a)
RKW 24-14K
300 24
12.5
1.9 297.5
23.99
12.4
RKW 28-23K
600 28
21.4
1.3 593.8
28.01
21.2
RKW 48-32K
1500 48
31.3
1.5 1529.4
48.4
31.6
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Duration
Duration
Percent of Nominal

Seconds
Cycles
Seconds
Cycles
DUT 60Hz
DUT 50Hz SEMI F47
Results
1
60
1
50
35%
30%
80%
Passed
0.50 30 0.50 25 35% 30% 80%
Passed
0.50
30
0.50
25
30%
30%
70%
Passed
0.25 15 0.25 12.5 30% 30% 70%
Passed
0.20 12 0.20 10 30% 30% 70%
Passed
0.20
12
0.20
10
30%
30%
50%
Passed
0.17 10 0.17 8.5 30% 30% 50%
Passed
0.08 5 0.08 4 25% 25% 50%
Passed
0.07 4 0.07 3.5 20% 25% 50%
Passed
0.05
3
0.05
2.5
15%
15%
50%
Passed
0.03 2 0.03 1.5 0% 0% 50%
Passed
0.02 1 0.02 1 0% 0% 50%
Passed
!
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3


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Duration
Duration
Percent of Nominal

Seconds
Cycles
Seconds
Cycles
DUT 60Hz
DUT 50Hz SEMI F47
Results
1
60
1
50
35%
35%
80%
Passed
0.50 30 0.50 25 35% 35% 80%
Passed
0.50
30
0.50
25
30%
30%
70%
Passed
0.25 15 0.25 12.5 30% 30% 70%
Passed
0.20 12 0.20 10 30% 30% 70%
Passed
0.20
12
0.20
10
30%
30%
50%
Passed
0.17 10 0.17 8.5 30% 30% 50%
Passed
0.08 5 0.08 4 25% 25% 50%
Passed
0.07 4 0.07 3.5 25% 25% 50%
Passed
0.05
3
0.05
2.5
20%
20%
50%
Passed
0.03 2 0.03 1.5 0% 0% 50%
Passed
0.02 1 0.02 1 0% 0% 50%
Passed
!
2#76')!80)4CD)0F8EBC)2'3")4'356"3)
Duration
Duration
Percent of Nominal

Seconds
Cycles
Seconds
Cycles
DUT 60Hz
DUT 50Hz SEMI F47
Results
1
60
1
50
40%
40%
80%
Passed
0.50 30 0.50 25 40% 40% 80%
Passed
0.50
30
0.50
25
35%
40%
70%
Passed
0.25 15 0.25 12.5 35% 35% 70%
Passed
0.20 12 0.20 10 35% 35% 70%
Passed
0.20
12
0.20
10
35%
35%
50%
Passed
0.17 10 0.17 8.5 35% 35% 50%
Passed
0.08 5 0.08 4 25% 25% 50%
Passed
0.07 4 0.07 3.5 25% 25% 50%
Passed
0.05
3
0.05
2.5
20%
15%
50%
Passed
0.03 2 0.03 1.5 0% 0% 50%
Passed
0.02 1 0.02 1 0% 0% 50%
Passed
)












4


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Voltage Sag Ride Through Curve
0%
20%
40%
60%
80%
100%
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Duration (in seconds)
Voltage (% of Nominal)
DUT 60Hz
SEMI F47
DUT 50Hz

/?G5=')!8B)4CD)BF8BEC)+,-.)/01)4?@'82%=;5G%)H5=I')
Voltage Sag Ride Through Curve
0%
20%
40%
60%
80%
100%
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Duration (in seconds)
Voltage (% of Nominal)
DUT 60Hz
SEMI F47
DUT 50Hz

)

5


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Voltage Sag Ride Through Curve
0%
20%
40%
60%
80%
100%
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Duration (in seconds)
Voltage (% of Nominal)
DUT 60Hz
SEMI F47
DUT 50Hz

)



























6


The power supplies showed themselves to be robust and resistant to sags, allowing 1s 40% sags in some instances,
before the output of the power supplies would collapse. To illustrate the magnitude of the sags, figures below
contain waveforms of the actual sags induced into the power supplies.

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)

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Electrical Environment

Steady state measurements were taken prior to testing. Table C-1 through Table C-3 lists measurements taken to
characterize the electrical environment of the individual power supplies during SEMI F47 compliance testing, at
50/60 Hz.

Table C-1 Steady State Measurements RKW 24-14K
RKW 24-14K
Measurement Parameters
Test Process State
60 Hz
Test Process State
50 Hz
Rated Voltage P-N
208 208
Voltage (Va-n)
206
206
Current (Ia)
1.61
1.68
Power (KWa-n)
0.32
0.33
Volt Amps (KVA)
0.33
0.34
Vthd (Phase A) %
2.7%
2.8%
Ithd (Phase A) %
12%
15%
I1 1.6
1.65
I3 0.14
0.16
I5 0.11
0.2
Power Factor
0.98
0.98
Crest Factors
1.48
1.5
Hertz 60
50









8


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RKW 28-23K
Measurement Parameters
Test Process State
60 Hz
Test Process State
50 Hz
Rated Voltage P-N
208 208
Voltage (Va-n)
205
206
Current (Ia)
3.18
3.87
Power (KWa-n)
0.64
0.64
Volt Amps (KVA)
0.65
0.66
Vthd (Phase A) %
2.7%
2.75%
Ithd (Phase A) %
9%
9.20%
I1 3.16
3.81
I3 0.2
0.21
I5 0.17
0.16
Power Factor
0.99
0.99
Crest Factors
1.47
1.52
Hertz 60
50

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RKW 48-32K
Measurement Parameters
Test Process State
60 Hz
Test Process State
50 Hz
Rated Voltage P-N
208 208
Voltage (Va-n)
205
203
Current (Ia)
7.88
7.96
Power (KWa-n)
1.6
1.6
Volt Amps (KVA)
1.61
1.62
Vthd (Phase A) %
280.0%
2.9%
Ithd (Phase A) %
390%
4%
I1 7.87
7.96
I3 0.16
0.22
I5 0.18
0.17
Power Factor
1
0.99
Crest Factors
1.38
1.41
Hertz 60
50

)



9





Attachment B - Test Configuration

Test Configuration
The SEMI F42 compliant voltage sag generator was placed in series with the main power feed, in according with
SEMI F42 and shown in Figure B-1. The Main power feed for this test was an amplifier that was adjustable for
voltage and frequency. This allowed a precise setting of 208 Vac and 50 or 60 Hz.
.


Figure B-1 Test Configuration

5 0 / 6 0 H z 2 0 8 V a c
S o u r c e
E P R I P E A C S a g
G e n e r a t o r
P o w e r S u p p l i e s
V a r i a b l e R e s i s t i v e
L o a d
2 0 8 V a c
2 0 8 V a c
V d c
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10


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The SEMI F47 Specification for Semiconductor Processing Equipment Voltage Sag Immunity document defines
the threshold that a semiconductor tool must operate without interruption (per SEMI F42) and it also provides a
target for the facility and utility systems. The Recognizing semiconductor factories require high levels of power
quality due to the sensitivity of equipment and process controls and that Semiconductor processing equipment is
especially vulnerable to voltage sags, this document defines the voltage sag ride-through capability required for
semiconductor processing, metrology, and automated test equipment.
The requirements in this international standard were developed to satisfy semiconductor industry needs. While more
stringent than existing generic standards, this industry-specific specifi