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IGL-2101 / IGPS-2101 2 - 11
10 eV to 1000 eV, Higher Energy Option up to 5 keV
Constant Spot Very Low Energy Ion Beams
IGL-2101 / IGPS-2101
LOW ENERGY ION GUN / POWER SUPPLY
E
LECTRON
G
UNS
I
ON
G
UNS
E
MITTERS
D
ETECT
ORS
C
OMPONENTS
I
NDEX
/ I
NFORMA
TION
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700
The Kimball Physics IGL-2101 Ion Gun, with its matching IGPS-2101
Power Supply, has applications in low energy sputtering, charge
neutralization, calibration of detector systems and other surface
physics studies. It is a complete subsystem ready to attach to the
users vacuum system and turn on.
Beam energy, beam current and spot size are independently
adjustable over wide ranges. The energy is variable from 10 eV to
1 keV, and the ion beam current from 1 nA to 100 nA. A higher energy
range up to 5 keV is available as an option. By use of multistaging
and a computer-designed ion zoom lens, a constant beam current is
maintained over a wide range in energy, with a spot size also roughly
constant.
The IGL-2101 gun uses an oxide-coated cathode to generate ions by
electron impact ionization of gas admitted through an auxiliary gas
inlet. Ions can be obtained from the inert gasses, such as argon or
neon, as well as from some active gasses, such as oxygen or nitrogen.
The gun features an adjustable feedthrough assembly that allows the
mechanical alignment of the ion source unit with respect to the extract
and the optics column. This alignment can be done in real time while
the gun is operating at full voltage with beam on.
The gun design provides for differential pumping of the gas ionization
region with a 2¾ CF flange on the source chamber for attachment of a
small turbo pump.
UHV technology is used throughout. The ion gun can be run in
vacuums from 10
-11
torr to 10
-5
torr. The electron source cathode is not
damaged by repeated exposure to atmospheric gasses or water vapor
when cold. The ion gun is bakable to 350°C with cables removed.
Electron source assemblies are user-replaceable; spare electron
source assemblies can be purchased new, and used assemblies may
be returned to the factory for rebuild. Complete ion source units are
also available and can be rebuilt. Alternatively, the entire ion gun can
be sent back to the factory for complete cleaning, rebuild, electron
source cathode replacement, and optional in-vacuum testing.
FOR USE IN:
SURFACE PHYSICS STUDIES
LOW ENERGY SPUTTERING
ION BEAM EXPERIMENTS
CHARGE NEUTRALIZATION
DETECTOR CALIBRATION
FEATURES / OPTIONS:
IONS FROM INERT OR ACTIVE GASES
WIDE ENERGY RANGE
VERY LOW ENERGIES
CONSTANT CURRENT BEAM
CONSTANT SPOT SIZE
ZOOM LENS FOCUSING
DEFLECTION, RASTERING
DIFFERENTIAL PUMPING
COMPUTER / REMOTE CONTROL
ILG-2101 Ion Gun mounted on a
2¾ inch
Flange Multiplexer, with differential pumping port
The IGPS-2101 Power Supply features a modular design with
miniaturized power supply clusters, optically isolated signals, and the
new FlexPanel digital interface controller. The included power supplies
are Ion Beam Energy, Source/ ECC, Electron Energy, Field Control,
Extract, Focus, and X,Y Deflection.
The new FlexPanel provides a digital display screen and an encoder
wheel for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gun
power supplies. An RS-232 serial port and an analog input/output
connector are included on standard power supply units. All common
computer interface bus types can be accommodated, by use of
appropriate digital to analog converters. RS-422/485 conversion is
possible.
An optional LabVIEW
TM
computer program designed for the IGL-2101
is available for remote computer control and metering using National
Instrument DAQ boards and SCSI connectors on the IGPS-2101. The
program provides a virtual panel of controls and meters on the users
computer screen.
A rastering option can be provided by an additional separate power
supply unit, the Raster Generator Deflection Unit.
IGPS-2101 Ion Gun Power Supply with FlexPanel controller
N
NE
EW
W It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.
IGL-2101 ION GUN SPECIFICATIONS
ION BEAM ENERGY
Standard: 10 eV to 1 keV (Independently adjustable)
Optional: 10 eV to 5 keV
BEAM CURRENT
1 nA to 100 nA (Independently adjustable)
ENERGY SPREAD
Less than 5 eV at low currents, calculated
ION SPECIES
Inert gases, Some active gases
ION GENERATION
METHOD
Electron impact ionization of gas admitted though the
auxiliary gas inlet
SPOT SIZE
1 mm to 20 mm (Independently adjustable)
WORKING DISTANCE Range: 5 mm to 100 mm
20 mm recommended for very low energy operation
BEAM DEFLECTION
4 Pole Electrostatic
PULSE CAPABILITY
None
BEAM UNIFORMITY
Gaussian
ELECTRON SOURCE
ASSEMBLY
Customer-replaceable electron source includes
precision-aligned cathode and cathode shield
with mounting and connectors
ION SOURCE UNIT
Customer-replaceable ionization source unit includes
electron source assembly in complete source assembly
IONIZATION
CATHODE
Thorium oxide (ThO
2
) or Yttrium oxide (Y
2
O
3
)
Cathode not harmed by repeated exposure to
atmospheric gases while cold
MOUNTING
Flange Multiplexer with a 2¾ inch rotatable CF,
including both tapped and clear mounting holes
GAS INLET SYSTEM
Two fully-bakeable inlets, 1.5 mm capillary with miniature
copper-gasket joints
Optional valve: Manually-operated leak valve
DIFFERENTIAL
PUMPING
Optional: Multiplexer with one 2¾ CFF side port to attach
small pump
Optional pump: Varian Turbo-V70 LP with controller
INTERNAL GUN
ALIGNMENT
Adjustable Feedthrough for mechanical alignment of ion
source unit while gun is operating
FARADAY CUP
Optional: Mounted on gun, manual or pneumatic control
BEAM ALIGNMENT
Optional: Mechanical alignment with ± 2° Port Aligner
INSERTION LENGTH
Range: 75 mm to 100 mm.
Shorter lengths possible, consult Engineering
GUN DIAMETER
34.3 mm at the gun flange
FEEDTHROUGHS
Multipin brazed ceramic, threaded stainless steel shell
CABLES /
CONNECTORS
Multiconductor high voltage fully ground-shielded cable,
coaxial focus and extract cables, low voltage deflection
cable, with mating aluminum shell connectors, to connect
gun and power supply.
Standard lengths: 3 m Optional: 5 m
MAXIMUM BAKEOUT
350°C with cables removed
(Faraday cup: removable pneumatic actuator 65°C max)
OPTIONAL RGDU-4A RASTER GENERATOR SPECIFICATIONS
RASTER GENERATOR
10 separate frequency selections for both X and Y
(X up to 1000 Hz, Y up to 50 Hz) Variable position
offset (centering). Variable window size. All controllable
remotely via RS-232, RS-422, RS-485, or analog input.
DIMENSIONS
(width x height x depth)
17 in. x 3.5 in. x 22 in.excluding handles
(425 mm x 90 mm x 560 mm); 19 in. rack mountable
IGPS-2101 ION GUN POWER SUPPLY SPECIFICATIONS
OUTPUTS
All necessary voltages to drive the IGL-2101 Ion Gun
ENERGY STABILITY
±0.01% per hour; ±0.02% per 8 hours at full output
BEAM STABILITY
±1.0% per hour with Electron Current Control or
±10% per hour after warm up without ECC,
depends on input gas presssure stability
CONTROLS
FlexPanel controls: Ion Energy, Source, Electron Energy,
Field Control, Extract, Focus, X and Y Deflection,
Electron Current Control
METERING
FlexPanel digital meters: Ion Energy, Ion Current,
Source Voltage, Source Current, Electron Energy,
Electron Emission Current, Field Control, Extract, Focus,
X and Y Deflection
COMPUTER/REMOTE
CONTROL & METER
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
Metering: 0 to +2 V ( -2 V to +2 V, deflection)
On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output and
RS-232 serial port (RS-422 or RS-485 available, if
specified at time of order)
Optional: SCSI metering and programming connectors
SOFTWARE
Optional: National Instruments LabVIEW
TM
file, designed
to run with computer DAQ boards NI 6034E and NI 6703
INPUT
115 VAC switchable to 230 VAC, 50 to 60 Hz single
phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,
Classified as a pollution degree 2, installation category
(overvoltage category) II environment unit
DIMENSIONS
(width x height x depth)
17 in. x 7 in. x 22 in. excluding handles
(425 mm x 180 mm x 560 mm); 19 in. rack mountable
Copyright
©
2006 by Kimball Physics, Inc. 3/7/06
(Dimensions in mm)
Typical performance;
data for guidance only.
IGL-2101 ION GUN
with Differential Pumping