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Tetra 30/50
Tetra 30/50
Diener electronic GmbH + Co. KG

www.plasma.de Tetra 30/50
Technical Data
Standard: Tetra-30-LF / Tetra-50-LF
1. Dimensions of cabinet (19 Rack):
without connections:
Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm
Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm
Weight: approx. 250 kg (without pump)
2. Dimensions of vacuum chamber:
Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm
Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm
Chamber volume: approx. 33 l / 57 l
3. Gas connections:
2 gas channels through needle valve
4. Plasma generator:
40 kHz / 0 1.000 W, innitely variable
5. Electrodes and goods-carriers:
The machine can be equipped with one to eight
goods-carriers / electrodes
optionally with a rotary-drum
6. Hardware Control:
Full automatic, process time by timer
Start button / Stop button
Parameters: pump down pressure, process
pressure, gas mass ow (ratios), stabilization
time, power, process time, ushing time
7. Connections:
Gas: 6 mm Swagelok
Power supply: 400 V / 16 A
8. Pump:
2-stage rotary vane pump
Pumping speed: min. 16 m
3
/hr
the pump can run with oxygen
exhaust lter Technical Data
Standard: Tetra-30-LF-PC / Tetra-50-LF-PC
1. Dimensions of cabinet (19 Rack):
Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm
Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm
Weight: approx. 250 kg (without pump)
2. Dimensions of vacuum chamber:
Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm
Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm
Chamber volume: approx. 33 l / 57 l
3. Gas connections:
2 gas channels through mass ow controller
4. Plasma generator:
40 kHz / 0 1.000 W, innitely variable
5. Electrodes and goods-carriers:
The machine can be equipped with one to eight
goods-carriers / electrodes
optionally with a rotary-drum
6. Hardware Control:
The PC control is based on an MS Windows computer
with an industrial eld bus.
Gas mass ow, pressure and power are regulated
Two Modes: manual or automatic operation
Parameter: pump down pressure, process pressure,
gas mass ow, pressure stabilization time, power,
process time, ushing time, ventilation time
Failure limits for: pressure, mass-ow, power,
temperature
Miscellaneous: digital pressure regulation, acoustic
advice of process-end, vacuum safety switch, door
safety switch, compressed air pressure sensor,
signal lamp, network interface card
7. Connections:
Gas: 6 mm Swagelok
Power supply: 400 V / 16 A
8. Pump:
2-stage rotary vane pump, pumping speed: min. 16 m
3
/hr
the pump can run with oxygen, exhaust lter Tetra 100/150
Diener electronic GmbH + Co. KG



www.plasma.de Tetra 100/150
Technical Data
Standard: Tetra 100 LF / Tetra 150 LF
1. Dimensions of cabinet (19 Rack):
without connections:
Tetra-100: approx. W 1000 mm x H 1800 mm x D
1000 mm
Tetra-150: approx. W 1000 mm x H 2400 mm x D
1000 mm
Weight: approx. 300 kg (without pump)
2. Dimensions of vacuum chamber:
Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm
Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm
Chamber volume: approx. 100 l / 150 l
3. Gas connections:
2 gas channels through needle valve
4. Plasma generator:
40 kHz / 0 2.500 W, innitely variable
5. Electrodes and trays:
The machine can be equipped with one to sixteen
goods-carriers / electrodes
optionally with a rotary-drum
6. Hardware Control:
Full automatic, process time by timer
Start button / Stop button
Parameters: pump down pressure, process
pressure, gas mass ow (ratios), stabilization
time, power, process time, ushing time
7. Connections:
Gas: 6 mm Swagelok
Power supply: 400 V / 16 A
8. Pump:
2-stage rotary vane pump
Pumping speed: min. 40 m
3
/hr (Tetra 100)


min. 65 m
3
/hr (Tetra 150)
the pump can run with oxygen
exhaust lter Technical Data
Standard: Tetra 100 LF PC / Tetra 150 LF PC
1. Dimensions of cabinet (19 Rack):
Tetra-100: approx. W 1000 mm x H 1800 mm x D
1000 mm
Tetra-150: approx. W 1000 mm x H 2200 mm x D
1000 mm
Weight: approx. 300 kg (without pump)
2. Dimensions of vacuum chamber:
Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm
Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm
Chamber volume: approx. 100 l / 150 l
3. Gas connections:
2 gas channels through mass ow controller
4. Plasma generator:
40 kHz / 0 2.500 W, innitely variable
5. Electrodes and trays:
The machine can be equipped with one to sixteen
goods-carriers / electrodes
optionally with a rotary-drum
6. Hardware Control:
The PC control is based on an MS Windows computer
with an industrial eld bus.
Gas mass ow, pressure and power are regulated
Two Modes: manual or automatic operation
Parameter: pump down pressure, process pressure,
gas mass ow, pressure stabilization time, power,
process time, ushing time, ventilation time
Failure limits for: pressure, mass-ow, power,
temperature
Miscellaneous: digital pressure regulation, acoustic
advice of process-end, vacuum safety switch, door
safety switch, compressed air pressure sensor,
signal lamp, network interface card
7. Connections:
Gas: 6 mm Swagelok
Power supply: 400 V / 16 A
8. Pump:
2-stage rotary vane pump, pumping speed: min. 40 m
3
/hr (Tetra 100), min. 65 m
3
/hr (Tetra 150)
the pump can run with oxygen, exhaust lter The Fully Automatic Control:
The fully automatic control was conceived for continuously running
processes with only a few parameter changes. In contrast to the PC
variant gas ow, pressure and power are only steered and not elec-
tronically regulated.
By pushing the Start
button, the plasma process
runs fully automatic:
1. Pump
2. Gas delivery
3. Power / Timer /
Plasma process
4. Flushing
5. Ventilation
There is also the possibility of
starting and of terminating each
sequence of the process
manually. For this the buttons
are successively operated.
The PC-control:
The PC-control was developed by us, for applications with frequent changes of pa-
rameters and a high requirement to the process regulation and the process docu-
mentation.
Visualization of the system
Simple operation
Password protection
Input of comments
Regulation of all
process-relevant parameters
Recording of all
process-relevant parameters
Documentation of all
process-relevant parameters
100 programs with 10
subroutines, each are storable
Customizations are possible 13.56 MHz generator
2.45 GHz generator
intake lter for vacuum pump
carbon exhaust lter
automatic door
barcode reader
bias voltage measurement
buttery valves
rotary drum (bulk goods, powder)
pressure-reducing valve
spare parts set
faraday box
gas shower
heating plate
ion measuring sensor
corrosive gas version
monomer bottle
network connection
PC-control
polymerization accessories
RIE electrode
safety valve
software (also customized)
special anges
temperature sensors
test inks
vacuum pump systems
device for powder treatment
trays (also customized)
service contract
additional gas channels
Mass-Flow-Controller, needle valves
roll to roll system (foil treatment)
more options on request
Available options:
pics: trays
for Tetra 100 / 150
pics: removable rotary drum
for Tetra 100 / 150 Diener electronic GmbH + Co. KG
Talstr. 5
D-72202 Nagold (Germany)
Telefon:
+49 (0) 7452 / 888 07 - 0
Telefax:
+49 (0) 7452 / 888 07 - 50
E-Mail:
info@diener-electronic.de
Visit our homepage:



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