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Omega-Van App Rep 1-800-342-3747
1- 800-F I B E R-I R
vanzetti.com
e-mail: info@vanzetti.com
®
®
OMEGA VANZETTI
®
The Leader in Infrared
Temperature Measurement
and Control
Sales and Service
OMEGA VANZETTI, INC.
Six Merchant Street, Sharon, MA 02067
Tel: (781) 784-4733 Fax: (781) 784-2447
B-02
Advantages of the fiber optic
infrared approach as illustrated
in Fig. 1 are: Fast response time to 10 mSec (0 to 63%) Wide temperature range of operation
(in sub ranges) Wide variation of spot sizes and target distances Fiber optics enable non-contact temperature
measurements Fiber optics can reach inside hermetically sealed
vessels and carry the radiation signal from the
wafer to remotely located consoles Ability to control temperatures with hi-low logic
and/or proportional control options if desired Optional output include: 4-20 md, 0-10 vdc and
thermocouple types J or K Adjustable emissivity control
CONTROL OF SEMICONDUCTOR MANUFACTURING
Semiconductor wafer induction
heating for doping, epitaxial
deposition, sputtering etc.,
is generally carried out in
hermetically sealed quartz
vessels, where vacuum or
precisely controlled gas
atmospheres are present.
Precise temperature
control of the wafers
is necessary for the
correct amount of doping,
deposition or sputtering.
Since the heating is done by
an RF induction energy field, no
conventional temperature monitor-
ing devices can possibly be used.
Furthermore, the
OMEGA VANZETTI
®
optical fiber can be manually
scanned along the length of the
induction oven to determine its
thermal profile and to eliminate
temperature gradients by adjusting
the spacing between the turns of
the induction coil.
IR DETECTOR
HEAD
LENS FOCUSED FIBER OPTIC
FIG. 1
$
2,800
.00
BASIC SYSTEM
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