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5500 SERIES APCVD CONVEYOR SYSTEMS
Application
Substrate
Thin Film
Film Properties
Transparent
Sheet Glass (BSG,
Sn0
2
-F
Bulk Resistivity <600 µ cm.
Conductive Oxide
Soda-lime)
Sheet Res. to 10 /sq.
>85% Optical Transmission
12-20% Haze adjustable,
(F-dopant dependent)
Diffusion Barrier
Silicon Wafer
Si0
2
Non-Porous, defect/pinhold free
Anti-static
Sheet Glass
Sn0
2
5-100 k /sq
Clear, Colorless below 400Å
Barrier undercoat
Soda-lime
Si0
2
In-line barrier pre-coat for Sn0
2
Sheet Glass
Thickness adjusted
Optically clear
Insulating layer
Sheet Glass,
Si0
2
Thickness adjusted/application
Silicon Wafer
500Å to 2500Å typically
Anti-reflective,
Glass, Silicon Wafer
Ti0
2
Adjustable Index,
reflective layer
from 1.8 to 2.35,
Refractive index uniformity ±1%
Custom applications
5500 SERIES
APCVD CONVEYOR
SYSTEMS
5500 SERIES CVD CONVEYOR SYSTEMS
ARISING FROM EXPERIENCE
SierraTherm Production Furnaces, Inc.
200 Westridge Drive Watsonville, CA 95076
(831) 763-0113 Fax (831) 763-1509 www.sierratherm.com
5500 SERIES APCVD FILMS High Volume Production Consistently Uniform Films Industrys Best Process
Control System ADVANTAGES
The 5500 Series APCVD conveyor system excels in
continuous high volume processing of substrates
requiring single as well as multi-layer thin films.
SierraTherms in-line system design assures each
substrate receives the same process treatment. Maintenance conscious design allows chemical
injectors and exhaust ducting to be cleaned
while in place on the system Multiple injector heads can be used in series
within a single system, maximizing process
throughput, uniformity, and flexibility while
minimizing cost Modular chemical vapor injector head
assemblies allow quick and easy installation and
removal from the coating chamber Location and design of stainless steel bubbler
systems maximize control and serviceability All injector head parts are durable precision
machined structures ensuring accurate
chemical delivery even after extended use Pump-based, bi-directional bulk refill system
provides continuous chemical refill without
process interruption or manual transfer Continuous self-cleaning mechanisms
in critical exhaust restrictions prevent
flow altering residue build-up Automatic process exhaust and
precursor flow control guarantee
consistent film results Three tiers of graded, power saving
insulation reduce energy bills Stable, unsurpassed temperature uniformity
control ensures consistent process results
The APCVD Graphical User Interface
features the SierraTherm MicroTherm
TM
Monitoring system: a Microsoft
Windows
TM
based software package
for comprehensive system operation
and processing monitoring. Here are
just a few of the features of this
powerful software: All process gas flows are monitored
and recorded via software interface
with Electronic Mass-Flow
Controllers Easy to operate graphical user
interface On-screen system parameter editing
of temperature, gas flow, and belt
speed set-points including high/low
alarm limits Recording and viewing of system
parameters with user definable
time-base. Historical data can be
stored on the system PC or
downloaded for archival storage. Event log recording of all system
alarms and operator actions/
responses with time/date of
occurrence and operator identifier User definable multi-level password
protection allowing different levels
of system control access Automatic downloading of process
recipes at user selected times and
intervals Full color on-screen profiler
featuring 9 channel capability and
profile analysis utilities Unlimited recipe storage with
descriptive text files SPC data collection compatible with
leading spreadsheet and data base
systems On-line System knowledge base
with instruction and troubleshooting
manual
5500 SERIES APCVD CONVEYOR SYSTEMS
MicroTherm
TM
The Most Powerful Control System In The Industry
5500 Series Atmospheric Pressure Chemical Vapor Deposition Systems
Multi port injector head
and exhaust vent
Bulk chemical storage
and refill system
Level and temperature controlled
chemical vapor bubblers
The SierraTherm 5500 Series systems are designed
specifically for high volume production atmospheric
pressure chemical vapor deposition applications.
Configurations for deposition of TiO
2
, SnO
2
, and SiO
2
are
available in these state-of-the-art high throughput systems.
Incorporating the latest in continuous production APCVD
technology, SierraTherm Chemical Vapor Deposition
systems provide the efficient reliable performance required
in todays competitive manufacturing environment.